Unit type pneumatic vibration isolation systemMKB series
MKB series covers a wide range of loading mass with good value for the price.
- Passive
Business Fields
- For Optical & Laser
- For Measurement
- For Semiconductor
- Unit type
Features
外観図
Specifications
- SPECIFICATIONS
| MODEL | MKB-0390 | MKB-0590 | MKB-0930 | MKB-1500 |
|---|---|---|---|---|
| Natural freqency | Vertical：3.5～4.3Hz / Horizontal：3.0～3.8Hz | |||
|
Vibration Isolation method | Air suspension | |||
| Damping method | Damping by Oil damper | |||
| Leveling method |
Automatic Leveling mecanical air valve (Positioning Tolerance: ±100μm） | |||
|
Dimensions W×D×H(mm) | 225×225×155 | 270×270×155 | 340×340×155 | 400×400×155 |
|
Mass(kg) [kg/unit] | 19 | 30 | 45 | 61 |
|
Payload(kg) [Using 4 unis] | 3800 | 5900 | 9300 | 15000 |
| AxB(mm) | 200x200 |
210x210 240x240 |
250x250 308x308 |
300x300 368x368 |
| ΦC(mm) | 12 | 16 | 16 | 16 |
| Supplied Air Pressure |
0.5MPa (Air source：Compressed air by an air compressor, relieving a factory's piping of its air,or liquid nitrogen gas） | |||
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