MRZ series | MEIRITZ SEIKI CO., LTD.

Active Pneumatic Suspention SystemMRZ series

Active Pneumatic Suspention System

Based on MAPS series, we have developed high performance and reasonable Active Pneumatic Suspention System MRZ series!

Active

Business Fields

For Measurement
For Semiconductor

Active Pneumatic Suspention System MRZ series

Unit type

Features

Applications

FPD・semicondoctor equipment、Electron microscopy、UHV-SPM、Measuring machine、Ultraprecision machine、etc.

Active vibration isolation in six degrees of freedom

Each unit has two air pressure actuators: vertical and horizontal, and can experience excellent performance of vibration isolation, vibration suppression and precise positioning.

FB+FloorFF control

FB: Feedback
FloorFF: Floor Feedforward
StageFF: Stage Feedforward (Option)

「Light and Compact」「Save Electricity 」「Reasonable Price」！

Realize Light weight and compact, save electricity, and reasonable price.

Patent

Japanese Patent No. 5457821

Specifications

SPECIFICATIONS
Transmissibility
Drawing

Type	MRZ-120	MRZ-200
Payload Range per 4 units [kg]	500～1,500	1,500～4,400
Dimensions of a Unit W×D×H [mm]	240x240x191	324x252x191
Mass of a Unit [kg/unit]	25	34
Supplied Air Pressure [MPa]	0.6～0.8(Clean dry air)
Typical Air Consumption [l/min]	45～65
Maximum Air Consumption [l/min]	120
Power Supply Voltage [V]	100～240(Single-Phase AC,50/60Hz)
Maximum Power Consumption [VA]	120
Environmental Temperature [℃]	0～40
Relative Humidity [%RH]	35～85
Vibration Isolation method	Vibration Isolation by Air Pressure Control
Positioning Tolerance [mm]	±0.001～0.050※
Dimensions of Controller [mm]	W435xD300xH118
Mass of a Controller [kg]	7.5

Type	MRZ-330	MRZ-520
Payload Range per 4 units [kg]	4,000～12,800	10,000～32,000
Dimensions of a Unit W×D×H [mm]	504x404x191	694x594x191
Mass of a Unit [kg/unit]	60	110
Supplied Air Pressure [MPa]	0.6～0.8(Clean dry air)
Typical Air Consumption [l/min]	120～170
Maximum Air Consumption [l/min]	300
Power Supply Voltage [V]	100～240(Single-Phase AC,50/60Hz)
Maximum Power Consumption [VA]	120
Environmental Temperature [℃]	0～40
Relative Humidity [%RH]	35～85
Vibration Isolation method	Vibration Isolation by Air Pressure Control
Positioning Tolerance [mm]	±0.001～0.050※
Dimensions of Controller [mm]	W435xD300xH118
Mass of a Controller [kg]	7.5

※The vibration transmissibility curves and the positioning tolerance sometimes vary according to not only the environmental conditions of the place where MRZ will be installed but also the structure or behavior of the precision machine mounted on MRZ.