Active Pneumatic Suspention SystemMRZ series
Active Pneumatic Suspention System
Based on MAPS series, we have developed high performance and reasonable Active Pneumatic Suspention System MRZ series!
- Active
Business Fields
- For Measurement
- For Semiconductor
- Unit type
Features
Applications
FPD・semicondoctor equipment、Electron microscopy、UHV-SPM、Measuring machine、Ultraprecision machine、etc.
Active vibration isolation in six degrees of freedom
Each unit has two air pressure actuators: vertical and horizontal, and can experience excellent performance of vibration isolation, vibration suppression and precise positioning.
FB+FloorFF control
FB: Feedback
FloorFF: Floor Feedforward
StageFF: Stage Feedforward (Option)
「Light and Compact」「Save Electricity 」「Reasonable Price」！
Realize Light weight and compact, save electricity, and reasonable price.
Patent
Japanese Patent No. 5457821
Specifications
- SPECIFICATIONS
- Transmissibility
- Drawing
| Type | MRZ-200 | MRZ-200 |
|---|---|---|
| Payload Range per 4 units [kg] | 500～1,500 | 1,500～4,400 |
| Dimensions of a Unit W×D×H [mm] | 240x240x191 | 324x252x191 |
| Mass of a Unit [kg/unit] | 25 | 34 |
| Supplied Air Pressure [MPa] | 0.6～0.8(Clean dry air) | |
| Typical Air Consumption [l/min] | 45～65 | |
| Maximum Air Consumption [l/min] | 120 | |
| Power Supply Voltage [V] | 100～240(Single-Phase AC,50/60Hz) | |
| Maximum Power Consumption [VA] | 120 | |
| Environmental Temperature [℃] | 0～40 | |
| Relative Humidity [%RH] | 35～85 | |
| Vibration Isolation method | Vibration Isolation by Air Pressure Control | |
| Dimensions of Controller [mm] | W435xD300xH118 | |
| Mass of a Controller [kg] | 7.5 | |
| Type | MRZ-330 | MRZ-520 |
|---|---|---|
| Payload Range per 4 units [kg] | 4,000～12,800 | 10,000～32,000 |
| Dimensions of a Unit W×D×H [mm] | 504x404x191 | 694x594x191 |
| Mass of a Unit [kg/unit] | 60 | 110 |
| Supplied Air Pressure [MPa] | 0.6～0.8(Clean dry air) | |
| Typical Air Consumption [l/min] | 120～170 | |
| Maximum Air Consumption [l/min] | 300 | |
| Power Supply Voltage [V] | 100～240(Single-Phase AC,50/60Hz) | |
| Maximum Power Consumption [VA] | 120 | |
| Environmental Temperature [℃] | 0～40 | |
| Relative Humidity [%RH] | 35～85 | |
| Vibration Isolation method | Vibration Isolation by Air Pressure Control | |
| Dimensions of Controller [mm] | W435xD300xH118 | |
| Mass of a Controller [kg] | 7.5 | |
MRZ-200S Vibration Transmissibility
MRZ drawing
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