As a recognized expert in vibration isolation technology, Meiriz Seiki Co.,Ltd is committed to providing optimal solution to customers' vibration problems.

Desktop type Active Vibration Isolation SystemME series

Desktop type Active Vibration Isolation System in three dimensions (six degrees of freedom)

The system can control vibration in three dimensions (six degrees of freedom) while continuously monitoring the vibration of the lading table. This is done by using an integrated actuator to provide an opposite phase signal to the measured vibration.

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Business Fields

  • For Microscopy
  • For Measurement
  • For Surface Analysis
Desktop type Active Vibration Isolation System ME series
  • Tabletop

Features

Active Vibration isolation in six degrees of freedom

The system can control vibration in three dimensions (six degrees of freedom) while continuously monitoring the vibration of the lading table. This is done by using an integrated actuator to provide an opposite phase signal to the measured vibration.

Automatic active control and leveling adjustment

Our originally developed control system optimizes gain control, which is an essential part of active vibration isolation.

Can be used even for small weight application

As reviewing structure of assenbly components, we successfully developed this series that can be used even for small weight application such as small-sized SPM, without degrading the performances of vibration isolation.

Outline drawing and Vibration transmissibility

ME transmissibility

Specifications

  • Specifications
ModelME-0405ME-0506
System typeDesktop type
Active control range0.5Hz~100Hz(passive congrol for 100Hz or higher)
Automatic mechanismActive control adjustment, leveling adjustment
StatusDisplayed on the front LCD control panel
Load weight [kg]※18080
Table dimensions [mm]430×530530×630
Machine dimensions [mm]※2432×532×93532×632×93
Machine weight [kg]3142
UtilityPower supply(100V-240Volts, AC slingle-phase, 50/60Hz)
Standard accessoriesInstruction manual, power cord (3m)
Options Loading table: Steel honeycomb optical tabletop
Soundproof booth
 Desktop machine frame

※1when equally loaded
※2excluding protrusions

Option

Loading table:steel honeycomb optical tabletop

It can be also provided top tap prrocessing M6-25mm, ferromagnetic SUS430 surface.

MEHSBjpg

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