As a recognized expert in vibration isolation technology, Meiriz Seiki Co.,Ltd is committed to providing optimal solution to customers' vibration problems.

Active Vibration isolation in six degrees of freedom

The system can control vibration in three dimensions (six degrees of freedom) while continuously monitoring the vibration of the lading table. This is done by using an integrated actuator to provide an opposite phase signal to the measured vibration.

Automatic active control and leveling adjustment

Our originally developed control system optimizes gain control, which is an essential part of active vibration isolation.

Can be used even for small weight application

As reviewing structure of assenbly components, we successfully developed this series that can be used even for small weight application such as small-sized SPM, without degrading the performances of vibration isolation.

Outline drawing and Vibration transmissibility