Honeycomb table air suspension vibration isolatorAYA series
The AYA Series is Meiritz's top-of the line series which features improved isolation performance and various useful functions. The AYA Series is the crystallization of advanced technology developed entirely by Meiritz. In particular, through improvement of holizontal direction vibration isolation performance, the AYA Series is able to respond to the optical experimentation needs including interferometers and holography equipment which are sensitive to minute vibrations in all directions.
- Passive
- Honeycomb
Business Fields
- For Optical & Laser
- Surface table
Features
Parallel Swing Mechanism
The AYA Series is equipped with Meiritz's original parallel swing mechanism which can be likened to a swing which can swing forward and backward an well as to the right and left, and moreover, can do so simultaneously. The result is the realization of the natural frequency in the horizontal direction being reduced to 0.5 Hz, less than 1/3 that of our previous models.
New Mechanisms for Emphasis on Ease of Use
The AYA Series is equipped with a newtype of damper which utilizes the new material Alpha-GEL Damping performance, which is able to promptly absorb any vibrations which cause the surface table to fluctuate, has been improved even more without any loss of vibration isolation performance thereby leading to increased ease of use. Alpha-GEL is the registered trademark of GELTEC CO.,LTD.
Specifications
- AYA-Type K4
- AYA-Type K5
AYA-Type K4
- M6 mounting holes ,either on 50mm grid or 25mm grid (to be specified by the user).
- Through hole and special tapped hole working available. Can join Honeycomb tables . (optional)
SPECIFICATIONS
| MODEL | 1007K4 | 1209K4 | 1510K4 | 1512K4 | 1809K4 | 1812K4 |
|---|---|---|---|---|---|---|
| Natural frequency | Vertical：1.1Hz Horizontal：0.5Hz | |||||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | |||||
| Damping method |
Vertical：Air damping using variable orifices Horizontal：Special damping using the α-GEL | |||||
| Leveling method | Automatic levelers keep the surface table level automatically | |||||
| Load weight(kg) | 300 | |||||
| Table dimensions(mm) | 1000×750 | 1200×900 | 1500×1000 | 1500×1200 | 1800×900 | 1800×1200 |
| Table thickness(mm) | 100 | 200 | ||||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | |||||
| Machine height(mm) | 800 | |||||
| Machine weight(kg) | 220 | 280 | 340 | 380 | 365 | 430 |
| Air supply | 0.35～0.70MPa | |||||
| MODEL | 2010K4 | 2012K4 | 2015K4 | 2210K4 | 2212K4 | 2215K4 |
|---|---|---|---|---|---|---|
| Natural frequency | Vertical：1.1Hz Horizontal：0.5Hz | |||||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | |||||
| Damping method |
Vertical：Air damping using variable orifices Horizontal：Special damping using the α-GEL | |||||
| Leveling method | Automatic levelers keep the surface table level automatically | |||||
| Load weight(kg) | 300 | |||||
| Table dimensions(mm) | 2000×1000 | 2000×1200 | 2000×1500 | 2200×1000 | 2200×1200 | 2200×1500 |
| Table thickness(mm) | 200 | |||||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | |||||
| Machine height(mm) | 800 | |||||
| Machine weight(kg) | 405 | 455 | 550 | 435 | 490 | 590 |
| Air supply | 0.35～0.70MPa | |||||
| MODEL | 2412K4 | 2415K4 | 3012K4 | 3015K4 | 3612K4 |
|---|---|---|---|---|---|
| Natural frequency | Vertical：1.1Hz Horizontal：0.5Hz | Vertical：1.2Hz Horizontal：0.8Hz | |||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | ||||
| Damping method |
Vertical：Air damping using variable orifices Horizontal：Special damping using the α-GEL | Air damping using orifices | |||
| Leveling method | Automatic levelers keep the surface table level automatically | ||||
| Load weight(kg) | 300 | ||||
| Table dimensions(mm) | 2400×1200 | 2400×1500 | 3000x1200 | 3000×1500 | 3600x1200 |
| Table thickness(mm) | 200 | 300 | |||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | ||||
| Machine height(mm) | 800 | ||||
| Machine weight(kg) | 530 | 635 | 735 | 900 | 855 |
| Air supply | 0.35～0.70MPa | ||||
| MODEL | 3615K4 | 4012K4 | 4015K4 |
|---|---|---|---|
| Natural frequency | Vertical：1.2Hz Horizontal：0.8Hz | ||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | ||
| Damping method | Air damping using orifices | ||
| Leveling method | Automatic levelers keep the surface table level automatically | ||
| Load weight(kg) | 300 | ||
| Table dimensions(mm) | 3600x1500 | 4000×1200 | 4000×1500 |
| Table thickness(mm) | 300 | ||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | ||
| Machine height(mm) | 800 | ||
| Machine weight(kg) | 1040 | 935 | 1145 |
| Air supply | 0.35～0.70MPa | ||
AYA-Type K5
- M6 mouting holes ,either on 50mm grid or 25mm grid (to be specified by the user).
- Suitable for class 100 clean room uses. (each tapped hole is airtight and an automatic leveler is equipped with exhaust air drain line).
SPECIFICATIONS
| MODEL | 1007K5 | 1209K5 | 1510K5 | 1512K5 | 1809K5 | 1812K5 |
|---|---|---|---|---|---|---|
| Natural frequency | Vertical：1.1Hz Horizontal：0.5Hz | |||||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | |||||
| Damping method |
Vertical：Air damping using variable orifices Horizontal：Special damping using the α-GEL | |||||
| Leveling method | Automatic levelers keep the surface table level automatically | |||||
| Load weight(kg) | 300 | |||||
| Table dimensions(mm) | 1000×750 | 1200×900 | 1500×1000 | 1500×1200 | 1800×900 | 1800×1200 |
| Table thickness(mm) | 100 | 200 | ||||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | |||||
| Machine height(mm) | 800 | |||||
| Machine weight(kg) | 230 | 310 | 380 | 425 | 405 | 485 |
| Air supply | 0.35～0.70MPa | |||||
| MODEL | 2010K5 | 2012K5 | 2015K5 | 2210K5 | 2212K5 | 2215K5 |
|---|---|---|---|---|---|---|
| Natural frequency | Vertical：1.1Hz Horizontal：0.5Hz | |||||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | |||||
| Damping method |
Vertical：Air damping using variable orifices Horizontal：Special damping using the α-GEL | |||||
| Leveling method | Automatic levelers keep the surface table level automatically | |||||
| Load weight(kg) | 300 | |||||
| Table dimensions(mm) | 2000×1000 | 2000×1200 | 2000×1500 | 2200×1000 | 2200×1200 | 2200×1500 |
| Table thickness(mm) | 200 | |||||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | |||||
| Machine height(mm) | 800 | |||||
| Machine weight(kg) | 460 | 520 | 630 | 495 | 560 | 675 |
| Air supply | 0.35～0.70MPa | |||||
| MODEL | 2412K5 | 2415K5 | 3012K5 | 3015K5 |
|---|---|---|---|---|
| Natural frequency | Vertical：1.1Hz Horizontal：0.5Hz | Vertical：1.2Hz Horizontal：0.8Hz | ||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | |||
| Damping method |
Vertical：Air damping using variable orifices Horizontal：Special damping using the α-GEL | Air damping using orifices | ||
| Leveling method | Automatic levelers keep the surface table level automatically | |||
| Load weight(kg) | 300 | |||
| Table dimensions(mm) | 2400×1200 | 2500×1500 | 3000x1200 | 3000×1500 |
| Table thickness(mm) | 200 | 300 | ||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | |||
| Machine height(mm) | 800 | |||
| Machine weight(kg) | 605 | 735 | 785 | 925 |
| Air supply | 0.35～0.70MPa | |||
| MODEL | 3612K5 | 3615K5 | 4012K5 | 4015K5 |
|---|---|---|---|---|
| Natural frequency | Vertical：1.2Hz Horizontal：0.8Hz | |||
| Vibration isolation method | Vertical：Diaphragm air spring Horizontal:Parallel swing mechanism | |||
| Damping method | Air damping using orifices | |||
| Leveling method | Automatic levelers keep the surface table level automatically | |||
| Load weight(kg) | 300 | |||
| Table dimensions(mm) | 3600x1200 | 3600x1500 | 4000×1200 | 4000×1500 |
| Table thickness(mm) | 300 | |||
| Table materials | Steel Honeycomb：Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t | |||
| Machine height(mm) | 800 | |||
| Machine weight(kg) | 915 | 1075 | 1005 | 1180 |
| Air supply | 0.35～0.70MPa | |||
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