Pneumatic vibration isolation systemAP-MKH series
High performance low natural frequency unit type vibration isolator, can be used for equipment having moving mass
The AP-MKH Series is Meiritz's top-of the line series among passive unit type vibration isolators, which features improved isolation performance and various useful functions.
- Passive
Business Fields
- For Measurement
- For Semiconductor
- Unit type
Features
外観図
Specifications
- 主な仕様
| Model | AP-230MKH | AP-270MKH | AP-330MKH |
|---|---|---|---|
| Natural frequency | vertical：1.5～2.0Hz / holizontal：0.7～1.0Hz | ||
|
Vibration Isolation method | Air suspension | ||
| Damping method | Dumping by Orifice | ||
| Leveling Method |
Automatic Leveling mecanical air valve (Positioning Tolerance: ±100μm） | ||
|
Dimensions （W×D×H mm） | 320×320×325 | 320x320x325 | 370×370×325 |
| Mass（kg/unit） | 54 | 64 | 81 |
| Payload（kg/4units） | 6200 | 8600 | 13000 |
| AxB(mm) | 290x290 | 290x290 | 340x340 |
| ΦC(mm) | 13 | 13 | 13 |
| Suppiled Air Pressure (MPa) |
0.5MPa (Air source：Compressed air by an air compressor, relieving a factory's piping of its air,or liquid nitrogen gas） | ||
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