Workstation type Active Vibration Isolation SystemME40-D series
The compact body houses active isolation mechanism in six degrees of freedom
In recent years the field of nanotechnology has made remarkable progress, and as a result the needs of customers have evolved. The ME40 Series stands as a reliable partner in this constantly changing field, capable of meeting your nanotechnology needs by maximizing the performance of high-precision and high-resolution precision instruments. The compact body houses active isolation mechanism in six degrees of freedom, to produce the ideal vibration environment which surpassed the capabilities of conventional passive vibration isolation systems.
- For Microscopy
- For Measurement
- For Surface Analysis
- Desk type
Active vibration isolation in six degrees of freedom
The system can control vibration in three dimensions (six degrees of freedom) while continuously monitoring the vibration of the loading table. This is done by using an integrated actuator to provide an opposite phase signal to the measured vibration.
Wide selection of sizes
We offer four sizes - two desktop types and two workstation types. For desktop types a damped alminium plate is used as the loading table, while a steel honeycomb optical tabletop is used for workstation types.
Automatic active control and leveling adjustment
Our originally developed control system optimizes gain control, which is an essential part of active vibration isolation.
(Please note that in some instances automatic control might not work, depending on the installation environment or whether the ME40 Series is used with a movable instrument, such as a high precision stage.)
Requires only a single power supply to run
The only thing needed to run the ME40 Series is a power supply. No air supply from a compressor or other unit is required, allowing you to use ME40 series wherever you go.
Precision measuring and processing instruments such as scanning probe microscopes (SPM), confocal laser microscopes, interferometer systems, 3D configuration measuring equipment, and displacement meter systems
|Active control range||0.5Hz～100Hz（passive control for 100Hz or higher）|
|Automatic mechanism||Active control adjustment, leveling adjustment|
|Status||Displayed on the front LCD control panel|
|Utility||Power supply（100V-240V, AC single-phese, 50/60Hz）|
|Standard accessories||Instruction manual, power cord(3m)|
We can provide tap holes on the top surface. |
Please contact us in detail.
※uniformly distributed load
※※Protrusions are not included.
Dedicated soundproof booths and desktop machine frame are also available. Please contact us for more information about these products.
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